PROJECTION AND LIGHT EXPOSURE DEVICE,申请号JP19930028372-传众专利搜索

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发明名称	PROJECTION AND LIGHT EXPOSURE DEVICE
摘要
申请公布号	JPH05304076(A)	申请公布日期	1993.11.16
申请号	JP19930028372	申请日期	1993.02.18
申请人	NIKON CORP	发明人	SHIRAISHI NAOMASA
分类号	G03F7/20;H01L21/027;H01L21/30;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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