DEVICE FOR HOLDING SUBSTRATES

摘要

LYB 338-JEL/FBF Holder for a planar substrate includes a first portion with a lip angled toward a front surface of the substrate, which surface is to be coated, and a resilient mask fixed to the inside of the first portion and extending beyond the lip. The holder further includes a rear portion facing the substrate opposite the coating source, and leaf springs fixed to the rear portion for urging the substrate against the mask.