发明名称 WIRE CLAMPER FOR WIRE BONDER
摘要 PURPOSE:To prevent damage to a wire by reducing impact force to the wire at the time of clamping. CONSTITUTION:A wire clamper for a wire bonder has a clamper fixing arm 4 installed to a bonding head body, a clamper operating arm 5 opening-closing operated centering around the fulcrum 2a of the clamper fixing arm 4, clamper chips 7 mounted at the left end of the clamper fixing arm 4 and at the left end of the clamper operating arm 5 respectively, a voice coil motor 99 set up at the right end of the clamper fixing arm 4 and at the right end of the clamper operating arm 5 and a control section controlling the voice coil motor 9 so as to decrease clamping speed immediately before clamping.
申请公布号 JPH05304185(A) 申请公布日期 1993.11.16
申请号 JP19920109590 申请日期 1992.04.28
申请人 HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD 发明人 OOHASHI YUUJI
分类号 H01L21/60 主分类号 H01L21/60
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