| 摘要 |
<p>PURPOSE:To realize a three-dimensional structure forming device which is capable of forming an optional three-dimensional structure through a small number of processes and suitable for forming a functional device which includes semiconductors. CONSTITUTION:A three-dimensional structure forming device which utilizes the light exposure of functional material is provided, where the device is equipped with a liquid crystal shutter 11 which varies in pattern basing on drive signals inputted from outside, an exciting light source which irradiates the liquid crystal shutter 11 with light, a reduction projection lens 13 which dwindles and projects light transmitted through the liquid crystal shutter 11, a fine movement stage 14 which sets a specimen 20 on which resist 20 is applied to a point on a wafer 21 where the lens 13 is focused and finely moves the specimen 20 in the direction of an optical axis, and a control circuit 16 which drives the mask 11 and the stage 15 synchronizing them with each other.</p> |
