发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To suppress a difference in level between a memory cell part and a peripheral circuit part so as to increase a storage capacity per unit area in a semiconductor device having a capacitor on a part of a memory cell. CONSTITUTION:This semiconductor device is composed of a storage electrode 19, in which a capacitor is formed inside an opening part formed on the insulating films 14, 15 on an impurity diffusion layer (source-drain region) 13 composing a transistor while being shaped in the shape of the eaves so as not to contact with the inside wall surface of said opening part, a dielectric film 20 covering the top, the side, the underside of the eaves of this storage electrode 19 and a counter electrode 21 covering the storage electrode 19 and the dielectric film 20 while a part is buried inside the opening part.
申请公布号 JPH05304272(A) 申请公布日期 1993.11.16
申请号 JP19920134511 申请日期 1992.04.28
申请人 NEC CORP 发明人 IWASA SHINYA
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108 主分类号 H01L27/04
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