| 摘要 |
PURPOSE:To enable high-speed rotation of a rotary mechanism which is used for inspection of hard disc. CONSTITUTION:A motor 8 composed of a shaft 7 having a rotor 2, and a stator 3, is arranged on a vacuum side, while a magnetic fluid seal 4 is arranged on an atmospheric side. The shaft 7 is composed of coaxially extending first and second shafts 7A, 7B. The second shaft 7B has a small outer diameter. The magnetic fluid seal 4 is arranged on an outer peripheral side of the second shaft 7B, so that reduction of a contact surface is attained. |
