发明名称 |
Optical sensor having a wave guide substrate with interferometer integrated therein |
摘要 |
A sensor for detecting substances including hydrocarbons includes an integrated optical interferometer in the form of a Mach-Zehnder interferometer having a measuring arm and a comparison arm in a wave guide substrate. A polymer such as polysiloxane is applied as a superstrate to the wave guide in the region of the measuring arm. This superstrate can be penetrated by the substance to be detected. Swelling response, gas absorption, refractive index of the polymer and doping with chromophores or fluorophores, layer thickness and layer length are all parameters which can be adapted for a substance-selective performance. Other means of selection include various superstrates on a number of interferometers mounted parallel on a chip and polychrome measurements in combination with methods of pattern recognition constitute further means of selection.
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申请公布号 |
US5262842(A) |
申请公布日期 |
1993.11.16 |
申请号 |
US19910780867 |
申请日期 |
1991.10.18 |
申请人 |
IOT ENTWICKLUNGSGESELLSCHAFT FUER INTEGRIERTE OPTIKTECHNOLOGIE MBH |
发明人 |
GAUGLITZ, GUENTER;INGENHOFF, JAN;FABRICIUS, NORBERT |
分类号 |
G01J9/02;G01N21/45;G01N21/77;(IPC1-7):G01B9/02 |
主分类号 |
G01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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