| 摘要 |
PURPOSE:To make the transient time extremely short from the start of operation to the stop of temperature rise of a horn itself. CONSTITUTION:In a wire bonder equipped with a horn 1 for giving ultrasonic vibration wave from an ultrasonic oscillator 5 to a capillary 4 through which a thin metal wire 3 is inserted to the tip, a cylindrical cover 14 extending to the tip portion of the horn 1 is attached to a horn supporting portion 6, and the periphery of the horn 1 is surrounded by said cylindrical cover 14. And a plate-shaped ceramic heater 15 is attached to the outer or inner peripheral surface of the cylindrical cover 14. Also, an infrared temperature sensor 16 is located at a portion near the surrounding of the tip portion of the horn 1 projecting out from the tip end of the cylindrical cover 14; and a controller 17, a CPU 18 and a driver 19 is sequentially connected to the output of the temperature sensor 16, and the driver 19 is connected to the heater 15. |
