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发明名称
摘要
申请公布号
JPH0545011(Y2)
申请公布日期
1993.11.16
申请号
JP19820062902U
申请日期
1982.04.27
申请人
发明人
分类号
G01N23/225;H01J37/141;H01J37/15;H01J37/21;H01J37/24;H01J37/252;(IPC1-7):H01J37/141
主分类号
G01N23/225
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代理人
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