| 摘要 |
PURPOSE:To improve moisture resistant load life of a stacked type piezoelectric actuator. CONSTITUTION:After an element 8 is eletrostatically painted with an external loading resin 10, the element is hardened by the heat treatment. In this case, the element is hardened by the heat treatment under the vacuum atmosphere, without leaving bubbles within the external loading resin 10. Otherwise, after the element is hardened by the heat treatment under the atmospheric condition, like the existing method, the liquid resin 12 is supplied with pressure to eliminate bubbles within the external loading resin 10. Thereby, since any bubbles are not left in the external loading resin, even if the external loading resin absorbes the moisture in the air during operation of element, quantity of saturated and absorbed water content can be reduced and moisture resistant load life can be improved. |
