SEMICONDUCTOR MANUFACTURING EQUIPMENT,申请号JP19920101358-传众专利搜索

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发明名称	SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号	JPH05299312(A)	申请公布日期	1993.11.12
申请号	JP19920101358	申请日期	1992.04.21
申请人	SUMITOMO ELECTRIC IND LTD	发明人	FUJII SATORU
分类号	H01L21/02;(IPC1-7):H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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