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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH05299591(A)
申请公布日期
1993.11.12
申请号
JP19920104505
申请日期
1992.04.23
申请人
NEC CORP
发明人
SHIDA SATOSHI
分类号
H01L21/76;H01L21/331;H01L21/8249;H01L27/06;H01L29/73;H01L29/732;(IPC1-7):H01L27/06
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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