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发明名称
METHOD FOR CONTACT HOLE FORMATION
摘要
申请公布号
JPH05299417(A)
申请公布日期
1993.11.12
申请号
JP19920131849
申请日期
1992.04.23
申请人
SONY CORP
发明人
ISHIDA MINORU
分类号
H01L21/3205;H01L21/768;H01L23/522;(IPC1-7):H01L21/320;H01L21/90
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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