| 摘要 |
PURPOSE:To obtain uniform and stable plasma discharge by suppressing a drop in the voltage of a plasma electrode. CONSTITUTION:This device consists of a liquid crystal cell substrate 4 which has plural signal electrodes D arranged in parallel to one another along a specific main surface, a plasma cell substrate 7 which has mutually parallel plasma electrodes 8 deposited to be opposed to the the liquid crystal cell substrate at right angles to the signal electrodes D, a liquid crystal layer 6 which is interposed between both the substrates, and a plasma chamber 11 which is formed between the liquid crystal layer 6 and plasma cell substrate 7 and wherein ionizable gas is charged. A partition wall 9 is formed only at the cathode K of the plasma electrode 8 and partially covered. The exposure area of the cathode K becomes small, so a discharging current can be suppressed and the voltage drop is also suppressed. |
