SOLAR BATTERY AND ITS MANUFACTURE

摘要

PURPOSE:To enable mass production and a large area by using a hetero junction which is formed on a crystalline silicon substrate and a silicon wide band gap window layer formed by capacitive coupling type plasma CVD method thereon. CONSTITUTION:A hetero junction is formed between a layer 1 consisting of first conductivity crystalline silicon and a silicon and oxygen-based second conductivity hydro-amorphous silicon thin film 2. Light absorption coefficient of an oxygen added hydro-amorphous silicon material reduces with an addition amount of oxygen and its photoelectromotive force generated by the hetero junction increases. Since the thin film 2 can be formed by a capacitive coupling plasma CVD method, it can be formed uniformly at a low temperature on a crystalline silicon substrate of a large area or laminated together with a polycrystalline silicon thin film.