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发明名称
MASS FLOW CONTROLLER
摘要
申请公布号
JPH05297955(A)
申请公布日期
1993.11.12
申请号
JP19920126797
申请日期
1992.04.20
申请人
NEC CORP
发明人
SANGO TOSHIAKI
分类号
G05D7/06;(IPC1-7):G05D7/06
主分类号
G05D7/06
代理机构
代理人
主权项
地址
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