| 摘要 |
<p>PURPOSE:To simply manufacture a thin film varistor having varistor characteristics in accord with the circuit of various working voltages at low temperature. CONSTITUTION:At least a titanium(Ti) metal film 2 is formed on a substrate 1, they are dipped into a treatment aqueousl solution of pH 13 containing strontium ions (Sr<3+>) of 1mol/l or more, and a strontium titanate (SrTiO3) thin film 3 is formed on the surface of the titanium metal film 2 by conducting a hydrothermal treatment at 100 deg.C or higher. Besides, a plurality of metal films 4 and 5 are formed on the strontium titanate thin film 3, and a path, where a current passes a plurality of times between the metal films 4 and 5 and the opposing titanium metal film 2 through the intermediary of the metal films 4 and 5 and the strontium titanate thin film 3, is formed.</p> |
