发明名称 PICTURE PROCESSOR AND DEVICE AND METHOD FOR INSPECTING PATTERN
摘要 PURPOSE:To read an arbitrary picture pattern related to the inspected area of a picture to be inspected, and to attain the high speed of the inspection processing of this pattern by selecting automatically the contents of all registers without outputting fixedly only the contents of the specified register in a register group. CONSTITUTION:This picture processor is constituted so as to be provided with the register group 11 consisting of plural registers to store temporarily picture data D to be used for picture processing, a picture selecting means 12 to select and output the picture data D at a position designated in relation to the register group 11, and a data processing means 13 to execute data processing on the basis of the selected picture data D, and a pattern inspecting device is constituted so as to be provided with a picture processing means 15 consisting of the picture processor, a picture acquiring means 14 to acquire the picture of an object 17 to be inspected and output the picture data D, and a control means 16 to control the input/output of the picture acquiring means 14 and the picture processing means 15.
申请公布号 JPH05298429(A) 申请公布日期 1993.11.12
申请号 JP19920097900 申请日期 1992.04.17
申请人 FUJITSU LTD 发明人 TANIGUCHI SHIGEKI;HIZUKA TETSUO;ANDO MORITOSHI
分类号 G01N21/88;G01B11/24;G01N21/956;G06F17/30;G06T1/00;G06T7/00;H01L21/66;H04N7/18 主分类号 G01N21/88
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