| 摘要 |
<p>PURPOSE:To increase response speed by enlarging a moisture adsorption area by increasing the surface area by providing a recessed part on both main surfaces of a plate-shaped humidity-sensitive body. CONSTITUTION:After chromic oxide, magnesium oxide, and titanium oxide powders are blended in a specific weight ration and are subjected to hydraulic forming, they are calcined to create a plate-shaped humidity-sensitive body 7 which consists of MgTiO3 ceramic. An electrode consisting of ruthenium paste is coated on both main surfaces of the humidity-sensitive body 7 and are heated and treated at a specified temperature for forming electrodes 4 and 6. Then, when ten square recessed parts 8 which are approximately 0.05mm deep and wide are provided on both main surfaces of the humidity-sensitive body 7, the surface area is increased by approximately 18%. Then, the humidity- sensitive body 7 is mounted on an alumina substrate where Ag-Pd paste is printed as an electrode and the electrodes 4 and 6 and the electrode on the alumina substrate are allowed to continue. Thus, by increasing the surface area of the humidity-sensitive body, the response speed of the sensor can be increased.</p> |
