发明名称 Halbleiteranordnung mit einem Elektrodenfleck.
摘要 In a semiconductor device in which copper or copper alloy bonding wire (16) is bonded to an electrode pad (21) on a semiconductor element (13), the electrode pad (21) is formed of a first metal layer (18) ohmically contacting the semiconductor element, a second metal layer (19) hard enough not to be deformed at wire bonding step, and a third metal layer (20) for bonding a copper wire, to suppress variation in the electric characteristics of a bonding portion and the production of stain in the semiconductor element at wire bonding step.
申请公布号 DE3787709(D1) 申请公布日期 1993.11.11
申请号 DE19873787709 申请日期 1987.12.10
申请人 KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP 发明人 USUDA, OSAMU C/O PATENT DIVISION, MINATO-KU TOKYO 105, JP
分类号 H01L21/60;H01L21/28;H01L23/485;H01L23/532;H01L29/43 主分类号 H01L21/60
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