Dünnschichtmusterstruktur.

摘要

A conductive pattern is formed by laser scribing of a conductive thin film formed on a soda-lime glass substrate suitable for liquid crystal devices. A first ion blocking film interposed between the glass substrate and the conductive pattern has its integrity disrupted by the laser scribing and to remedy this a second ion blocking film is provided over the structure. The second ion blocking film serves to inhibit the drift of sodium ions from the substrate through the laser scribed pattern formed in the first ion blocking film and the conductive film.