| 摘要 |
<p>A head for jetting a liquid using a piezoelectric device, more particularly a liquid jet head and a method of production thereof which reduces the size, attains a higher density and improves liquid jet characteristics using a PZT thin film piezoelectric device, and has high producibility. A thin piezoelectric device comprising a thin diaphragm (103), a lower electrode (104), a piezoelectric film (105) and an upper electrode (106) is formed on a liquid chamber (102) and a plurality of the devices are disposed on the same substrate. The pitch of disposition of the liquid chambers (102) is the same as that of the nozzles (109), and the dimension of the liquid chambers, the thickness of the piezoelectric films (105) and the thickness of the diaphragm (103) are so constituted as to satisfy a specific relation. A first substrate (101) on which the piezoelectric devices, the liquid chambers (102), etc, are formed and a second substrate (107) on which liquid flow paths (108) are formed are bonded and integrated with each other so as to constitute the liquid jet head. The production method comprises: 1) forming the diaphragms on the substrate and forming the piezoelectric devices on the diaphragms using a thin film forming technique, and then 2) disposing means for protecting the surface of the substrate on the side of the piezoelectric device by a jig, etc, and forming the liquid chambers by etching from the opposite surface. The liquid jet head of this invention is preferably used for a liquid jet recording apparatus for recording characters, image data, etc, on a medium such as paper using an ink.</p> |
