Three=dimensional workpiece structuring device using particle beam - uses detected pressure of particle beam to control position of jet relative to workpiece

摘要

The structuring device has a jet (2) used to provide a particle beam (4) for defined removal of material from the workpiece (1). A pressure sensor (10) measures the pressure of the particle beam for controlling the position of the jet relative to the workpiece. The pressure sensor lies at the periphery of the jet adjacent the exit aperture for the particle beam and pref. has two separate sensor zones, providing pressure values which are compared to detect the angle of the jet relative to the workpiece. ADVANTAGE - Simple high-precision structuring of workpiece.