Methode zur Verbesserung der Ebenheit geätzter Spiegelfacetten.,申请号DE19896009779-传众专利搜索

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发明名称	Methode zur Verbesserung der Ebenheit geätzter Spiegelfacetten.
摘要
申请公布号	DE68909779(D1)	申请公布日期	1993.11.11
申请号	DE19896009779	申请日期	1989.06.16
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US	发明人	BUCHMANN, PETER LEO, DR., CH-8135 LANGNAU AM ALBIS, CH;VETTIGER, PETER, CH-8135 LANGNAU AM ALBIS, CH;VOEGELI, OTTO, DR., CH-8803 RUESCHLIKON, CH;WEBB, DAVID JOHN, DR., CH-8803 RUESCHLIKON, CH
分类号	H01L21/302;G02B6/122;H01L21/3065;H01L27/15;H01S5/00;H01S5/02;H01S5/028;H01S5/16;H01S5/22;(IPC1-7):H01S3/025;H01S3/085;H01S3/19;G02B6/12	主分类号	H01L21/302
代理机构		代理人
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