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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH05299426(A)
申请公布日期
1993.11.12
申请号
JP19930014891
申请日期
1993.02.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
KUSAKABE KENJI
分类号
H01L21/322;(IPC1-7):H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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