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经营范围
发明名称
WAFER CARRIER DEVICE
摘要
申请公布号
JPH05294406(A)
申请公布日期
1993.11.09
申请号
JP19920125522
申请日期
1992.04.17
申请人
SONY CORP
发明人
TSUKAMOTO HIRONORI
分类号
B65G1/00;B65G49/07;B65H7/14;H01L21/67;H01L21/677;H01L21/68;(IPC1-7):B65G1/00
主分类号
B65G1/00
代理机构
代理人
主权项
地址
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