| 摘要 |
PURPOSE:To reduce the positional deviation of a trimming starting point and to prevent defective trimming due to the positional deviation by using teaching for tip size of a resistor. CONSTITUTION:When tip size 32a in the X direction is obtained, a computer moves a beam positioner to the last resistance 31x of a first block by beam positioner control part to correct teaching in the same way as a first resistance 31a. The tip size 32a in the X direction is obtained and the trimming starting point of each tip resistance is calculated. Consequently, resistance in one block or the positional. deviation of the trimming starting point accumulating as the block advances can be reduced by an error of the tip size by observation and defective trimming is prevented. |
