| 摘要 |
Apparatus for measuring the shape of a remote surface (10) comprises a laser (2) whose beam is split into a measuring beam (4) and reference beam (5). The reference beam is passed through a path length modulating mechanism (13, 14) to a datum point (18) while the measuring beam (4) is passed to a point (9) on the remote surface. The reflected beams return along the same paths and are combined at beam splitter (6). The interferometric pattern in the combined beams is analysed to determine the path length of the measuring beam while the transverse coordinates of the point (9) are determined from the position of a beam directing mechanism (12). This process is repeated for a number of points on the surface to measure the shape of the surface (10).
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