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发明名称
摘要
申请公布号
JPH0580677(B2)
申请公布日期
1993.11.09
申请号
JP19840057699
申请日期
1984.03.26
申请人
CANON KK
发明人
MASAKI JUICHI
分类号
G09F9/30;G02F1/136;G02F1/1368;H01L21/336;H01L29/78;H01L29/786;(IPC1-7):G09F9/30;H01L29/784
主分类号
G09F9/30
代理机构
代理人
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地址
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