| 发明名称 |
Method of producing microstructures having regions of different structural height |
| 摘要 |
PCT No. PCT/DE91/00602 Sec. 371 Date Mar. 31, 1992 Sec. 102(e) Date Mar. 31, 1992 PCT Filed Jul. 25, 1991 PCT Pub. No. WO92/02858 PCT Pub. Date Feb. 20, 1992.A method of producing microstructures having regions of different structural height includes providing a layer of positive resist material that is sensitive to X-ray radiation with microstructures on a side facing a source of X-rays. Using a mask, the layer of a positive resist material is partially irradiated with the X-rays. The irradiated regions are removed with the aid of a developer.
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| 申请公布号 |
US5260175(A) |
申请公布日期 |
1993.11.09 |
| 申请号 |
US19920844586 |
申请日期 |
1992.03.31 |
| 申请人 |
KERNFORSCHUNGZENTRUM KARLSRUHE GMBH;BUERKERT GMBH & CO. |
发明人 |
KOWANZ, BERND;BLEY, PETER;BACHER, WALTER;HARMENING, MICHAEL;MOHR, JUERGEN |
| 分类号 |
G03F7/26;G02B6/122;G03F1/00;G03F1/14;G03F1/22;G03F7/00;G03F7/20;H01L21/027;(IPC1-7):G03F7/16;G03F7/30 |
主分类号 |
G03F7/26 |
| 代理机构 |
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