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发明名称
Charged particle beam exposure system and charged particle beam exposure method
摘要
申请公布号
US5260579(A)
申请公布日期
1993.11.09
申请号
US19920851400
申请日期
1992.03.13
申请人
FUJITSU LIMITED
发明人
YASUDA, HIROSHI;TAKAHASHI, YASUSHI;SAKAMOTO, KIICHI;YAMADA, AKIO;OAE, YOSHIHISA;KAI, JUNICHI;FUEKI, SHUNSUKE;KAWASHIMA, KENICHI
分类号
H01J37/09;H01J37/317;(IPC1-7):H01J37/302
主分类号
H01J37/09
代理机构
代理人
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