Process for regeneration of cleaning compounds

摘要

This invention is a process to rejuvenate the depleted metal salt oxidizing agents used in microetch cleaning compositions and to maintain the desired etch rate. This process comprises the steps of: (1) measuring the reduced metal salt oxidizing agent in the microetch cleaning composition, (2) adding a rejuvenating agent in a stoichiometric or sub-stoichiometric quantity, and (3) mixing and allowing the rejuvenating agent to react with the reduced metal salt oxidizing agent to restore the concentration of the metal salt oxidizing agent to its approximate concentration in the original microetch cleaning composition.