| 摘要 |
PURPOSE:To provide an optical waveguide as a component of optical integrated circuits, with its refractive index controllable easily and accurately. CONSTITUTION:The surface of a SiO2 layer 2-bearing substrate 1 is provided with an Al alloy film 3 containing a dopant Si for controlling refractive index, and part of this film 3 is eliminated to form an optical waveguide pattern followed by anodizing to convert the ridge 4 of the Al alloy containing said dopant Si to a transparent oxide ridge 5, thus forming a core as optical transmission region. |
