ION-ASSISTED CONTROL TYPE SPUTTERING METHOD,申请号JP19920140866-传众专利搜索

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发明名称	ION-ASSISTED CONTROL TYPE SPUTTERING METHOD
摘要
申请公布号	JPH05295542(A)	申请公布日期	1993.11.09
申请号	JP19920140866	申请日期	1992.04.17
申请人	UBE IND LTD	发明人	OSADA YUKIHARU
分类号	C23C14/36;C23C14/35;C23C14/54;(IPC1-7):C23C14/54	主分类号	C23C14/36
代理机构		代理人
主权项
地址

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