发明名称 SEMICONDUCTOR TESTER
摘要 PURPOSE:To solve a trouble due to a cable by omitting a signal cable connected between a main body and a test head. CONSTITUTION:A tester is equipped with the main body 11 and the test heads 12 (12a, 12b). The transfer of a signal between the main body 11 and the test heads 12 is performed by a laser beam in spatial fashion. Therefore, a main body side optical transmitter/receiver 14 is mounted on the main body 11, and head side optical transmitter/receivers 15a, 15b on the test heads 12a, 12b. Infrared rays are used as the laser beam. Also, sharp directivity is attached to the laser beam.
申请公布号 JPH05292024(A) 申请公布日期 1993.11.05
申请号 JP19920085290 申请日期 1992.04.07
申请人 ASIA ELECTRON INC 发明人 YAMAGUCHI FUSAO
分类号 G01R31/26;H04B10/11;H04B10/112;H04B10/272 主分类号 G01R31/26
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