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发明名称
DEVICE FOR CONTROLLING BURNING IN VACUUM CHAMBER
摘要
申请公布号
JPH05290777(A)
申请公布日期
1993.11.05
申请号
JP19920085481
申请日期
1992.04.07
申请人
JEOL LTD
发明人
NORISHIMA HIROAKI
分类号
H01J37/18;H01L21/027;(IPC1-7):H01J37/18
主分类号
H01J37/18
代理机构
代理人
主权项
地址
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