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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05291415(A)
申请公布日期
1993.11.05
申请号
JP19920085710
申请日期
1992.04.07
申请人
NEC CORP
发明人
KUBO TORU
分类号
H01L21/31;H01L21/316;H01L21/768;H01L23/522;(IPC1-7):H01L21/90
主分类号
H01L21/31
代理机构
代理人
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