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发明名称
FIB ASSIST DEPOSITION DEVICE
摘要
申请公布号
JPH05291147(A)
申请公布日期
1993.11.05
申请号
JP19920085480
申请日期
1992.04.07
申请人
JEOL LTD
发明人
KASAHARA HARUO
分类号
H01L21/205;H01L21/268;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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