| 摘要 |
PURPOSE:To decrease drive voltage, and uniform discharge in a wide range by forming the part of a discharge electrode touching discharge gas of a conductive oxide, and providing a protrusion having specified width and height on the surface thereof. CONSTITUTION:The part of a discharge electrode touching discharge gas is formed of a conductive oxide made of a specified element having perovskite type crystal structure. A protrusion of 5-200mum width and of height being 1/2 of the width or more is formed on the surface of the electrode so that ions are incident slantingly thereon. When the width of the protrusion is less than 5mum, spatters occur easily and performance lacks stability, and when the width of the protrusion exceeds 200mum, the area of the electrode for slanting incidence decreases. When the height of the protrusion is low, the slanting area of the electrode becomes small. By forming the discharge electrode of the specified conductive oxide, and providing the protrusion of a specified size on the surface thereof, it is possible to decrease discharge voltage, to simplify a drive circuit, and to increase discharge efficiency. |
