| 摘要 |
PURPOSE:To provide clear vision and enable highly precise setting by leaving a mask by covering the cutting reference line and depositing an overclad as it is when a mask where a core is formed by patterning is removed. CONSTITUTION:The overclad 6 is deposited on the top surface of the core 2 of the optical waveguide chip 1 without fail, but the cutting reference line 4 is illegible in this state and the reflection factor is made larger to enable the cutting reference line to be seen clearly. For the purpose, the reflection factor can be increased by making the depositing process on the top surface of the core 2 for the cutting reference line different, for example, by providing a reflecting layer (1) or not by depositing the overclad 6 (b), etc. Those processes are performed not by processing the part of the cutting reference line 4 in a series of processes of the manufacture of the optical waveguide chip 1. This cutting reference line 4 is provided outside the area of the optical waveguide chip 1 at a distance, a wafer 3 can be positioned with high precision, and only initial setting is required. |
