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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH05291240(A)
申请公布日期
1993.11.05
申请号
JP19920119709
申请日期
1992.04.13
申请人
NEC CORP
发明人
AKIYAMA TAKAO
分类号
H01L21/205;H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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