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发明名称
MANUFACTURE OF METAL WIRING
摘要
申请公布号
JPH05291255(A)
申请公布日期
1993.11.05
申请号
JP19920092842
申请日期
1992.04.13
申请人
NEC CORP
发明人
YORIKANE MASAHARU
分类号
H01L23/52;H01L21/3205;(IPC1-7):H01L21/320
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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