| 摘要 |
PURPOSE:To enable a narrow band laser device to control laser beams accurately and stably in wavelength at a high speed. CONSTITUTION:At least, a mirror 15 is provided between a laser chamber 11 and a grating 16, the drawing direction of the grating 16 is set nearly coincident with the expanding direction of a beam expander 14, a plane which contains the drawing direction of the grating 16 and the expanding direction of a beam expander 14 is set nearly coincident with the reflecting plane of the mirror 15, and a means which changes the mirror 15 in mounting angle is provided. |
