| 摘要 |
PURPOSE:To properly detect a position of a specific part of a subject even if an image is an enlarged image by matching patterns between first and second image data and obtaining the position on a logic plane of the specific part of the subject. CONSTITUTION:A ROM 18 stores second (third) image data which is a pattern wherein voltage data of a specific range including one (other) edge of reference inner leads of a lead frame 14 is made into a graph on a second (third) logic plane logically formed in a memory space. An MPU 22 creates first image data made into a graph on a first logic plane based on the voltage data of the inner lead to be inspected created via a CCD camera 10 and stores it in a second memory 20b. The first image data and the second and third image data are pattern-matched to obtain a distance between both edges of the inner lead to be inspected, that is width. Further determination is performed as to whether the obtained width is within an allowable range with respect to reference width. |
