| 摘要 |
PURPOSE:To easily fabricate a lever part of a cantilever with good reproducibility, increase a spring constant and improve resistance against environments by constituting it of a diamond-like carbon film. CONSTITUTION:An opposite electrode is placed inside a vacuum reservoir, while a silicon substrate 1 is mounted on the electrode. After the reservoir is evacuated, CH4 gas is introduced to generate high frequency plasma so that a diamond-like carbon film 2 is formed (by plasma CVD method) on the substrate 1. Then the substrate 1 is etched to process the carbon film 2 into a triangular shape, and a probe 4 is formed at the tip. Then a metallic film 3 is provided on a rear of the carbon film 2. The carbon film 2 is amorphous and excellent in flatness, which can be grown with good reproducibility. Therefore a cantilever can be easily fabricated with good reproducibility. In addition since the carbon film 2 has a high spring constant and is chemically stable, performance of the cantilever can be improved and its resistance against environments can be improved. Furthermore, even if the metallic film 3 serving as a reflecting mirror is coated by a carbon film 2, resistance against environments can also be improved. |
