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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05283521(A)
申请公布日期
1993.10.29
申请号
JP19920079668
申请日期
1992.04.01
申请人
发明人
分类号
H01L21/82;G06F17/50;H01L21/822;H01L27/04;(IPC1-7):H01L21/82;G06F15/60
主分类号
H01L21/82
代理机构
代理人
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地址
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