| 摘要 |
<p>PURPOSE:To improve the surface roughness of a colored layer and to enable the automation of a polishing stage by polishing the colored layer while applying a prescribed pressure thereon by a dry type lapping film, then cleaning the surface thereof with a dry type cleaning tape. CONSTITUTION:After the colored layer is formed, a color filter 7 after the formation of the colored layer is imposed on a reciprocative moving table 6 and is attracted and fixed by a vacuum. On the other hand, the reaction of a pressure mechanism 11 is pressed via a platen 10 to the dry type lapping film 9 delivered from a supply reel 8. The color filter 7 on the reciprocative moving table 6 moves lienarly the dry type lapping film 9 and the colored layer of the color filter 7 is thereby so polished that the surface roughness attains a specific value or below. The dry type lapping film 9 is then replaced with the dry type cleaning tape and the surface of the colored layer subjected to the polishing is cleaned with the dry type cleaning tape.</p> |
