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经营范围
发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05283535(A)
申请公布日期
1993.10.29
申请号
JP19920103764
申请日期
1992.03.31
申请人
发明人
分类号
H01L23/52;H01L21/3205;H01L21/768;H01L23/522;(IPC1-7):H01L21/90;H01L21/320
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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