| 摘要 |
PURPOSE:To obtain a pellicle which prevents a tacky adhesive layer from peeling from a pellicle frame and does not allow the tacky adhesive layer to remain on a mask by forming ruggedness on the surface of the pellicle frame in the part to be stuck with the tacky adhesive. CONSTITUTION:The shape of the ruggedness to be formed on the pellicle frame is not particularly limited and may be regular projections or ruggedness and may be irregular ruggedness as well. The shape of the ruggedness includes, for example, a case there are plural parallel grooves, a case there are numerous grooves in a grid shape or other shapes, and a case of only the projections or ruggedness of circular columnar, spherical, circular trapezoidal, columnar and other shapes. The depth of the recesses in the ruggedness or the height of the projections is not particularly limited and is preferably >=10mum and <=600mum and more preferably >=70mum and <=400mum in order to sufficiently exhibit the effect of the ruggedness and to maintain the smooth surface of the applied tacky adhesive layer. |
