发明名称 VIBRATOR FOR PIEZOELECTRIC ACTUATOR AND MANUFACTURE THEREOF
摘要 PURPOSE:To provide a method for manufacturing to obtain stable quality even in the case of reduction in size and to improve characteristics of a piezoelectric actuator and a piezoelectric motor by realizing miniaturization of a piezoelectric element constituting a vibrator. CONSTITUTION:The method for manufacturing a vibrator for a piezoelectric actuator comprises a step 302 for forming a polarization pattern for constituting a plurality of piezoelectric elements on a piezoelectric material, a step 303 for polarizing the pattern, a step 304 for forming an arbitrary electrode pattern on the polarized material, a step 305 for separating the material formed with the electrode pattern in a predetermined shape, and a step 306 for fixing the elements obtained in the steps to an elastic element.
申请公布号 JPH05284760(A) 申请公布日期 1993.10.29
申请号 JP19920078034 申请日期 1992.03.31
申请人 发明人
分类号 H01L41/04;H02N2/00 主分类号 H01L41/04
代理机构 代理人
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